英文文献翻译

1、加速度传感器原理概述
加速度传感器是用来将加速度这一物理信号转变成便于测量的电信号的测试仪器。差容式力平衡加速度传感器则把被测的加速度转换为电容器的电容量变化。实现这种功能的方法有变间隙，变面积，变介电常量三种，差容式力平衡加速度传感器利用变间隙，且用差动式的结构，它优点是结构简单，动态响应好，能实现无接触式测量，灵敏度好，分辨率强，能测量0.01um甚至更微小的位移，但是由于本身的电容量一般很小，仅几pF至几百pF，其容抗可高达几MΩ至几百MΩ，所以对绝缘电阻的要求较高，并且寄生电容（引线电容及仪器中各元器件与极板间电容等）不可忽视。近年来由于广泛应用集成电路，使电子线路紧靠传感器的极板，使寄生电容，非线性等缺点不断得到克服。
差容式力平衡加速度传感器的机械部分紧靠电路板，把加速度的变化转变为电容中间极的位移变化，后续电路通过对位移的检测，输出一个对应的电压值，由此即可以求得加速度值。为保证传感器的正常工作.，加在电容两个极板的偏置电压必须由过零比较器的输出方波电压来提供。
2、变间隙电容的基本工作原理
如式2－1所示是以空气为介质，两个平行金属板组成的平行板电容器，当不考虑边缘电场影响时，它的电容量可用下式表示：
由式（2－1）可知，平板电容器的电容量是、A、的函数，如果将上极板固定，下极板与被测运动物体相连，当被测运动物体作上、下位移（即变化）或左右位移（即A变化）时，将引起电容量的变化，通过测量电路将这种电容变化转换为电压、电流、频率等电信号输出根据输出信号的大小，即可测定物体位移的大小，若把这种变化应用到电容式差容式力平衡传感器中，当有加速度信号时，就会引起电容变化C，然后转换成电压信号输出，根据此电压信号即可计算出加速度的大校
由式（2－2）可知，极板间电容C与极板间距离是成反比的双曲线关系。由于这种传感器特性的非线性，所以工作时，一般动极片不能在整个间隙，范围内变化，而是限制在一个较小的范围内，以使与C的关系近似于线性。
它说明单位输入位移能引起输出电容相对变化的大小，所以要提高灵敏度S应减少起始间隙,但这受电容器击穿电压的限制，而且增加装配加工的困难。
由式（2－5）可以看出，非线性将随相对位移增加面增加。因此，为了保证一定的线性，应限制极板的相对位移量，若增大起始间隙，又影响传感器的灵敏度，因此在实际应用中，为了提高灵敏度，减小非线性，大都采用差动式结构，在差动式电容传感器中，其中一个电容器C1的电容随位移增加时，另一个电容器C2的电容则减少，它们的特性方程分别为：
可见，电容式传感器做成差动式之后，非线性大大降低了，灵敏度提高一倍，与此同时，差动电容传感器还能减小静电引力测量带来的影响，并有效地改善由于温度等环境影响所造成的误差。
3、电容式差容式力平衡传感器器的工作原理与结构
3.1工作原理
如图1所示，差容式力平衡加速度传感器原理框图
电路中除了所必须的电容，电阻外，主要由正负电压调节器，四运放放大器LT1058，双运放op270放大器组成。
3.2差容式力平衡传感器机械结构原理
由于差动式电容，在变间隙应用中的灵敏度和线性度得到很大改善，所以得到广泛应用。如图2所示为一种差容式力平衡电容差容式力平衡传感器原理简图。主要由上、下磁钢，电磁铁，磁感应线圈，弹簧片，作电容中间极的质量块，覆铜的上下极板等部分组成。传感器上、下磁钢通过螺钉及弹簧相连，作为传感器的固定部分，上，下极板分别固定在上、下磁钢上。极板之间有一个用弹簧片支撑的质量块，并在此质量块上、下两侧面沉积有金属（铜）电极，形成电容的活动极板。这样，上顶板与质量块的上侧面形成电容C1，下底板与质量块下侧面形成电容C2，弹簧片一端与磁钢相连，另一端与电容中间极相连，以控制其在一个有效的范围内振动。由相应芯片输出的方波信号，经过零比较后输出方波，此方波经电容滤除其中的直流电压，形成对称的方波，该对称的方波加到电容的一个极板上，同时经一次反向后的对称波形加到另一个极板上。
当没有加速度信号时，中间极板处于上、下极板的中间位置C1＝C2，△C＝0后续电路没有输出；当有加速度信号时，中间极板（质量块）将偏离中间位置，产生微小位移，传感器的固定部分也将有微小的位移，设加速度为正时，质量块与上顶板距离减小，与下底板距离增大，于是C1＞C2，因此会产生一个电容的变化量△C，△C由放大电路部分放大，同时，将放大电路的输出电流引入到反馈网络。由于OP270的脚1和16分别与线圈两端相连，当有电流流过线圈时，将产生感应磁场，就会有电磁力产生。因为上、下磁钢之间有弹簧，所以在电磁力的作用下将使磁钢回到没有加速度时的位置，即此时的电容变化完全有加速度的变化引起，同时由于线圈与活动极板通过中心轴线相连，所以在电磁力的作用下，使中间极向产生加速度时的位移的相反的方向运动，即相当于在△C的放大
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1, acceleration sensor principle outlined

Acceleration sensor is used to a physical acceleration signal into facilitate measurement signals of the testing instrument. Poor let type force balance acceleration sensor is measured by the acceleration of the conversion of a capacitor capacitance change. To realize the function of the method, change, change clearance of dielectric constant change three, poor let type force balance acceleration sensor use change, and use the differential between the structure of the advantages of simple structure, it is, the dynamic response is good, can achieve without contacting measurement, sensitivity, the resolution ratio is strong, can measure 0.01 um even more small displacement, but because of their electricity capacity is very small, only a few general to several hundred pF the ruling zanu-pf, RongKang can be as high as a few M Ω to hundreds of M Ω, so the insulation resistance of the demand is higher, and parasitic capacitance (lead capacitance and instruments each component and capacitance between the plate etc) cannot be ignored. In recent years due to the widespread application of integrated circuits, make electronic circuit to close to the sensor, the plate parasitic capacitance, nonlinear shortcomings overcome constantly.

Poor let type force balance acceleration sensor mechanical parts close to circuit boards, the change of the acceleration for change among the displacement change a capacitor, the subsequent circuit for the detection of displacement by output, and a corresponding voltage value, which can be obtained that the acceleration value. To guarantee the normal work of the sensor., add in capacitance two plate bias voltage must by the zero comparator output pulse voltage to provide.

2, the change of capacitance between basic working principle

Such as type 2-1 air as medium is shown, two parallel plates form of the parallel plate capacitor, when not consider edge electric field, its influence electric capacity available next type says:

By type (2-1), it is known that the capacity of the plate capacitor is, A, function, if will be fixed on the plate, plate and tested objects in motion is linked together, when measured movement object to make, and displacement (i.e. change) or displacement (i.e. A change about), will cause the capacity of the change, through the measurement circuit will this capacitance change into voltage, current, frequency, and electrical signals according to the size of the output signal output, can determine the size of the displacement, if you put this change applied to capacitive sent let type force balance in the sensor, when speed signal with, would cause the capacitance change C, and then converted into voltage signal output, according to the voltage signal of the acceleration of senior colonel would be calculated

By type (2-2), it is known that the capacitance between the plate and the distance between the plate C is inversely proportional to hyperbolic relationship. Because of the sensor of the nonlinear characteristics, so work, generally move very piece in the gap, not within the scope of changing, but limit in a smaller range, so as to make and the approximate linear relationship in C.

It shows that the unit output capacitance of displacement can cause input relative size, so to improve sensitivity S should reduce initial clearance, but by the capacitor breakdown voltage of restrictions, and increase the difficulty of assembly processes.

By type (2-5) can see, nonlinear will increase with the relative displacement face increased. Therefore, in order to guarantee a certain linear, should limit the relative displacement of the plate, if increase starting clearance, the sensitivity of the sensor and influence, so in real application, in order to improve the sensitivity and reduce the nonlinear, most used differential structure, the differential capacitor sensor, one of the capacitor C1 capacitance increases, the other with displacement of a capacitor C2 capacitance reduction, which is the characteristic equation are:

Visible, capacitive sensor make differential after, nonlinear greatly reduce the sensitivity, raised a times, at the same time, differential capacitor sensor can also reduce the measurement of the impact of the static electricity, and effectively improve due to temperature, the environmental impact caused by error.

3, capacitive sent let type force balance sensors of the working principle and structure

3.1 working principle

As shown in figure 1 shows, poor let type force balance acceleration sensor principle diagram

In addition to must be in the circuit of the resistance, capacitance, the main positive and negative by voltage regulator, SiYun put LT1058 amplifier, double op-amp op270 amplifier composition.

3.2 sent let type force balance sensor mechanical structure principle

Due to differential capacitor, and gets clearance of the application of sensitivity and linearity are improved greatly, so widely used. As shown in figure 2 shows for a let type force balance capacitance indisputable theory poor let type force balance sensor principle diagram. Main consists of magnets, electromagnet, magnetic induction coils, spring of capacitance, among the quality of a piece, and the copper plate components. Sensor, under magnets through screws and spring is linked together, as part of the sensor, under the fixed, respectively, in the plate fixed under the magnets. There is between the plate with spring of the quality of the support of, and on this quality, the two sides of sedimentary have metal (copper), forming the activities of capacitance electrode plate. So, on the roof and quality of the side of the form capacitance arrays and quality C1, under the form side of capacitance C2, spring of end of the magnets are linked together, the other end and capacitance extremely connected, among to control their in a valid within the scope of the vibration. By corresponding chips of square wave signal output, after zero after comparing the output pulse, the square wave filter capacitance of dc voltage, form symmetric square wave, the symmetric square wave added to the capacitance of a plate, as a reverse the symmetric waveform after added to another on a plate.

When there is no acceleration signal, in the middle on the plate, plate under the middle position C1 = C2, train C = 0 follow-up circuit no output; When the speed with signal, the quality of plate (among) will deviate from the middle, small displacement sensor, have fixed part will also have small displacement, set for the timing, quality acceleration of roof is reduced, and the distance arrays and increase the distance, then C1 > C2, so will produce a capacitance of the variation of the train C, C train by amplifying circuit part, and at the same time, will enlarge the amplifier circuit output current is introduced into the feedback network. Because OP270 feet 1 and 16 respectively with the coil is linked together, when a current ends flows through a coil, will produce inductive magnetic field, will have the electromagnetic force generated. Because, under magnets have springs, so in between electromagnetic force under the action of will make magnets back to no acceleration, namely position at this time of capacitance change with changes in speed completely, and because the coil and activities through the center axis of the plate is linked together, so in the electromagnetic force, under the action of to produce extremely to the displacements of the acceleration in the opposite direction, which is equivalent to the C train amplification

acceleration transducer
An acceleration sensor. It includes a heavy block which is fixed in the middle of the first fiber segment. The two ends of the first fiber segment and the second fiber segment are separately linked to the first fiber coupling device and the second coupling device to form a nonequilibrium Mach- Condi interference instrument. The two fiber segments are fixed separately at the first base and the second base by glue. A breadth light source is combined with the input end of the nonequilibrium Mach- Condi interference instrument. In the meanwhile, through a light signal detector, the instrument output end is linked with the signal processing circuit module.

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